POLO TECNOLÓGICO UPVFAB
2020 - 2021
IP: Pascual Muñoz Muñoz: The new action continues the previous infrastructure project (“Micro-manufacturing for photonics, electronics and chemistry” GVA / IDIFEDER / 2018/042 (2018-2020). The infrastructure is at the class 100/10000 (ISO 5 / 7) 500 m2 micro-fabrication pilot line / clean room www.fab.upv.es). More specifically, it is intended to complement the installation with the following equipment: 1) (Deposition) Sputter for cylindrical samples, 2) (Attack) Wet banks and attack tanks for samples and wafers up to 6 inches, 3 ) (Attack) Extraction and neutralization systems for wet banks and attack tanks, 4) (Metrology) FTIR equipment with microscope for sample analysis. 5) (Post-process) Microscopic transfer equipment by priming chips from 2-4 inches wafers to 6 inches wafers. The general objective is to develop new technological processes in the work areas of the proposing groups (ITEAM, ITQ, CI2B), specifically: I) integrated photonics, II) integrated catalytic membranes and III) electro-chemical devices.